Oxygen-free precursor for chemical vapor deposition of gold films: thermal properties and decomposition mechanism

Thermal properties of oxygen-, phosphorus-, and halogen-free dimethylgold(III) diethyldithiocarbamate complex (CH 3 ) 2 AuS 2 CN(C 2 H 5 ) 2 (gold, dimethyl(diethylcarbamodithioato -S,S′)-) having excellent storage stability and the mechanism of its decomposition to elemental gold were studied. Satu...

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Veröffentlicht in:	Gold Bulletin 2011-09, Vol.44 (3), p.177-184
Hauptverfasser:	Turgambaeva, Asiya E., Zharkova, Galina, Semyannikov, Petr, Krisyuk, Vladislav V., Koretskaya, Tatyana, Trubin, Sergey, Kuchumov, Boris, Igumenov, Igor
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical properties Chemical vapor deposition Chemistry and Materials Science Decomposition (Chemistry) Gold Materials Science Metallic Materials Methods Original Paper Thermal properties
Online-Zugang:	Volltext
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