Oxygen-free precursor for chemical vapor deposition of gold films: thermal properties and decomposition mechanism

Thermal properties of oxygen-, phosphorus-, and halogen-free dimethylgold(III) diethyldithiocarbamate complex (CH 3 ) 2 AuS 2 CN(C 2 H 5 ) 2 (gold, dimethyl(diethylcarbamodithioato -S,S′)-) having excellent storage stability and the mechanism of its decomposition to elemental gold were studied. Saturated vapor pressure was found to be ~10 −3 –10 −1 Torr at 50–90°C. Decomposition of the vapor on the surface starts at T = 210°C. The temperature dependence of gas phase composition was studied using the original mass spectrometric technique, it was established that the decomposition of the compound on the surface in vacuum follows three main pathways. Two of them result in the formation of elemental gold, saturated C2–C4 alkanes and (1) protonated ligand or (2) methylated ligand. The third one results in elemental gold and gaseous products: C2–C3 alkylmercaptanes and CH 3 SCN(C 2 H 5 ) 2 . The formation of gold as a sole solid product within the temperature range 210–240°C was confirmed by X-ray photoelectron spectroscopy analysis. It was shown that the compound exhibits the best combination of volatility, thermal, and storage stability among volatile organogold complexes and thus it may be a promising precursor for obtaining gold films by chemical vapor deposition.