Effect of the Degree of Li[sub.3]PO[sub.4] Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films

Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10[sup.−6] S/cm is achieved through anodic evaporation of Li[sub.3]PO[sub.4] in a low-pressure arc. The microstructure and ionic conductivity of LiPON films are influenced by the proportion of free lithium in the vapor flow. This paper presents the results of a study on the plasma composition during anodic evaporation of Li[sub.3]PO[sub.4] in a discharge with a self-heating hollow cathode and a crucible anode. A method is proposed for adjusting the free lithium concentration in the gas-vapor (Li[sub.3]PO[sub.4] + N[sub.2]/Ar) discharge plasma based on changing the frequency of collisions of electrons with Li[sub.3]PO[sub.4] vapor in the anodic region of the discharge. It is demonstrated that an increase in the proportion of free lithium in the flow of deposited particles leads to an enhancement in the concentration and mobility of lithium ions in the deposited films and, subsequently, an improvement in the ionic conductivity of LiPON films.