Using Collisional Electron Spectroscopy to Detect Gas Impurities in an Open Environment: CH[sub.4]-Containing Mixtures

The collisional electron spectroscopy method for analyzing and determining gaseous impurities was further developed to realize the operation in an open environment. In addition, the method not only facilitates the registration of the impurity components, but also the reactive radicals generated from the discharge reaction. The sandwich-like discharge structure was used to generate a stable, non-local, negative glow equipotential plasma in an open environment, and the I–V characteristic curve of the plasma was collected using an additional sensor electrode. The collisional electron spectroscopy was obtained from the first derivative of the probe current I with respect to the probe potential V by adding a diffusion function to correct it. In addition, our experiment verifies the reliability of the sink theory.