Possibilities of structural engineering in multilayer vacuum-arc ZrN/CrN coatings by varying the nanolayer thickness and application of a bias potential

The possibility of attaining an superhard state in multilayer vacuum-arc ZrN/CrN coatings with a layer thickness of about 20 nm has been established. It has been shown that the application of a constant negative potential for structural engineering during deposition leads to the formation of solid s...

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Veröffentlicht in:Technical physics 2016-07, Vol.61 (7), p.1060-1063
Hauptverfasser: Sobol’, O. V., Andreev, A. A., Gorban’, V. F., Stolbovoy, V. A., Melekhov, A. A., Postelnyk, A. A.
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Sprache:eng
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