Specific features of the laser irradiation of thin molybdenum films

Laser irradiation of thin molybdenum films with a thickness of less than 100 nm is studied. An experimental hypothesis in accordance with which films of refractory metals can be laser-ablated owing to the formation of an intermediate oxide phase is experimentally proven. A threefold decrease in the...

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Veröffentlicht in:	Technical physics 2016-04, Vol.61 (4), p.579-583
Hauptverfasser:	Volkov, A. V., Kazanskiy, N. L., Moiseev, O. Yu, Paranin, V. D., Poletayev, S. D., Chistyakov, I. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Classical and Continuum Physics Dielectric films Molybdenum Physics Physics and Astronomy Physics of Nanostructures Radiation Thin films
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Laser irradiation of thin molybdenum films with a thickness of less than 100 nm is studied. An experimental hypothesis in accordance with which films of refractory metals can be laser-ablated owing to the formation of an intermediate oxide phase is experimentally proven. A threefold decrease in the thickness of the ablation region under the action of scanning laser radiation is interpreted.
ISSN:	1063-7842 1090-6525
DOI:	10.1134/S1063784216040241