Characteristics of a localized gas discharge

The rf capacitive gas discharge with an interelectrode distance of 15–200 µm is studied, and possible forms of its existence are established. The conditions for the formation of discrete microdischarges with a preset geometry, which are localized near some elements of the surfaces of the electrodes,...

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Veröffentlicht in:	Technical physics 2016, Vol.61 (1), p.47-52
Hauptverfasser:	Abramov, A. V., Pankratova, E. A., Surovtsev, I. S., Zolototrubov, D. Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Classical and Continuum Physics Physics Physics and Astronomy Plasma
Online-Zugang:	Volltext
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Zusammenfassung:	The rf capacitive gas discharge with an interelectrode distance of 15–200 µm is studied, and possible forms of its existence are established. The conditions for the formation of discrete microdischarges with a preset geometry, which are localized near some elements of the surfaces of the electrodes, are formulated.
ISSN:	1063-7842 1090-6525
DOI:	10.1134/S1063784216010023