A Thin-Film Capacitance Pressure Sensor

Results of theoretical and experimental investigations of thin-film capacitance sensors for measurements of static and pulsation pressures are presented. The sensor membrane is produced from Fe–Ni alloy.

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Bibliographische Detailangaben
Veröffentlicht in:	Measurement techniques 2015-03, Vol.57 (12), p.1403-1410
Hauptverfasser:	Kazaryan, A. A., Strel’tsov, E. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Alloys Analytical Chemistry Characterization and Evaluation of Materials Measurement Science and Instrumentation Physical Chemistry Physics Physics and Astronomy Sensors
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Results of theoretical and experimental investigations of thin-film capacitance sensors for measurements of static and pulsation pressures are presented. The sensor membrane is produced from Fe–Ni alloy.
ISSN:	0543-1972 1573-8906
DOI:	10.1007/s11018-015-0641-2