Crystallization of lead zirconate titanate films by laser annealing

The structure of lead zirconate titanate Pb(Zr x Ti 1 − x )O 3 thin films grown by chemical solution deposition on Si-SiO 2 -Ti-Pt substrates has been studied using transmission electron microscopy and energy-dispersive analysis. Films crystallization has been performed using laser annealing. It has...

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Veröffentlicht in:	Physics of the solid state 2012-05, Vol.54 (5), p.999-1001
Hauptverfasser:	Khmelenin, D. N., Zhigalina, O. M., Vorotilov, K. A., Lebo, I. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis Dielectric films Lead compounds Perovskite Physics Physics and Astronomy Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX) Solid State Physics Thin films Zirconium
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Beschreibung
Zusammenfassung:	The structure of lead zirconate titanate Pb(Zr x Ti 1 − x )O 3 thin films grown by chemical solution deposition on Si-SiO 2 -Ti-Pt substrates has been studied using transmission electron microscopy and energy-dispersive analysis. Films crystallization has been performed using laser annealing. It has been found that, in contrast to isothermal annealing where nucleation on the platinum layer dominates, crystallization and growth of spherical perovskite crystals occur in the film bulk. The perovskite phase crystal size increases from 10 to 120 nm with increasing laser beam energy.
ISSN:	1063-7834 1090-6460
DOI:	10.1134/S1063783412050174