Influence of low-intensive beta-irradiation on phase transformations in silicon at microindentation
Raman spectroscopy is used to investigate the morphology of silicon phase composition in the indenter imprint with spatial resolution of ~200 nm. Suppression of the efficiency of Si-XII, Si-III, and a-Si phase formation induced by beta-particle irradiation from a 90 Sr + 90 Y source (fluence F = 3...
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Veröffentlicht in: | Russian physics journal 2012, Vol.54 (8), p.914-917 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Raman spectroscopy is used to investigate the morphology of silicon phase composition in the indenter imprint with spatial resolution of ~200 nm. Suppression of the efficiency of Si-XII, Si-III, and a-Si phase formation induced by beta-particle irradiation from a
90
Sr +
90
Y source (fluence
F
= 3.6⋅10
10
cm
–2
) is revealed. |
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ISSN: | 1064-8887 1573-9228 |
DOI: | 10.1007/s11182-011-9699-8 |