Synchrotron study of the formation of nanoclusters in [Al.sub.2][O.sub.3]/Si[O.sub.x]/[Al.sub.2][O.sub.3]/Si[O.sub.x]/ ... /Si multilayer nanostructures

Synchrotron study of the formation of nanoclusters in [Al.sub.2][O.sub.3]/Si[O.sub.x]/[Al.sub.2][O.sub.3]/Si[O.sub.x]/ ... /Si multilayer nanostructures

[Al.sub.2][O.sub.3]/Si[O.sub.x]/A[1.sub.2][O.sub.3]/Si[O.sub.x]/.../Si(100) multilayer nanoperiodic structures (MNS) are studied by X-ray absorption near-edge structure spectroscopy (XANES). Experimental XANES spectroscopy spectra are obtained using synchrotron radiation. The formation of Si nanoclu...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2013-10, Vol.47 (10), p.1316
Hauptverfasser: Turishchev, S. Yu, Terekhov, V.A, Koyuda, D.A, Pankov, K.N, Ershov, A.V, Grachev, D.A, Mashin, A.I, Domashevskaya, E.P
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum oxide
Nanotechnology
Particle accelerators
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Zusammenfassung:[Al.sub.2][O.sub.3]/Si[O.sub.x]/A[1.sub.2][O.sub.3]/Si[O.sub.x]/.../Si(100) multilayer nanoperiodic structures (MNS) are studied by X-ray absorption near-edge structure spectroscopy (XANES). Experimental XANES spectroscopy spectra are obtained using synchrotron radiation. The formation of Si nanoclusters in the surface layers of the structures during their high-temperature annealing is observed. The structures featured intense size-dependent photoluminescence in the wavelength region near 800 nm. At the same time, it is shown that the formation of aluminum silicates is possible. The inversion effect of the intensity of the XANES spectra during the interaction of synchrotron radiation with MNSs is revealed. DOI: 10.1134/S106378261310028X
ISSN:1063-7826
DOI:10.1134/S106378261310028X