Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt

Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of materials science 2021-10, Vol.56 (28), p.16181
Hauptverfasser: Solonenko, Dmytro, Lan, Chuanqi, Schmidt, Constance, Stoeckel, Chris, Hiller, Karla, Zahn, Dietrich R. T
Format: Artikel
Sprache:eng
Schlagworte:
Dielectric films
Thin films
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 28
container_start_page 16181
container_title Journal of materials science
container_volume 56
creator Solonenko, Dmytro
Lan, Chuanqi
Schmidt, Constance
Stoeckel, Chris
Hiller, Karla
Zahn, Dietrich R. T
description
doi_str_mv 10.1007/s10853-021-06301-6
format Article
fullrecord <record><control><sourceid>gale</sourceid><recordid>TN_cdi_gale_incontextgauss_ISR_A669985618</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><galeid>A669985618</galeid><sourcerecordid>A669985618</sourcerecordid><originalsourceid>FETCH-gale_incontextgauss_ISR_A6699856183</originalsourceid><addsrcrecordid>eNqVi7FugzAUAK0okUKa_kAmrx1M37PBQLeIJmqXqirdEUWGOCJ2xTMSn98qyg9kuhvuGNshxAiQPRNCnioBEgVoBSj0gkWYZkokOagliwCkFDLRuGYbojMApJnEiL2WfhxNG6x3PPgXXnpBv1MIZrSu577j-yGm6SdGMVft1eYPHk7W8c4OF-L_22fYslXXDGQeb3xgT8fDd_km-mYwtXWtd8HMoW8movq9-qr3WhdFnmrM1T3tHyW9Q9g</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt</title><source>Springer Nature - Complete Springer Journals</source><creator>Solonenko, Dmytro ; Lan, Chuanqi ; Schmidt, Constance ; Stoeckel, Chris ; Hiller, Karla ; Zahn, Dietrich R. T</creator><creatorcontrib>Solonenko, Dmytro ; Lan, Chuanqi ; Schmidt, Constance ; Stoeckel, Chris ; Hiller, Karla ; Zahn, Dietrich R. T</creatorcontrib><identifier>ISSN: 0022-2461</identifier><identifier>EISSN: 1573-4803</identifier><identifier>DOI: 10.1007/s10853-021-06301-6</identifier><language>eng</language><publisher>Springer</publisher><subject>Dielectric films ; Thin films</subject><ispartof>Journal of materials science, 2021-10, Vol.56 (28), p.16181</ispartof><rights>COPYRIGHT 2021 Springer</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids></links><search><creatorcontrib>Solonenko, Dmytro</creatorcontrib><creatorcontrib>Lan, Chuanqi</creatorcontrib><creatorcontrib>Schmidt, Constance</creatorcontrib><creatorcontrib>Stoeckel, Chris</creatorcontrib><creatorcontrib>Hiller, Karla</creatorcontrib><creatorcontrib>Zahn, Dietrich R. T</creatorcontrib><title>Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt</title><title>Journal of materials science</title><subject>Dielectric films</subject><subject>Thin films</subject><issn>0022-2461</issn><issn>1573-4803</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNqVi7FugzAUAK0okUKa_kAmrx1M37PBQLeIJmqXqirdEUWGOCJ2xTMSn98qyg9kuhvuGNshxAiQPRNCnioBEgVoBSj0gkWYZkokOagliwCkFDLRuGYbojMApJnEiL2WfhxNG6x3PPgXXnpBv1MIZrSu577j-yGm6SdGMVft1eYPHk7W8c4OF-L_22fYslXXDGQeb3xgT8fDd_km-mYwtXWtd8HMoW8movq9-qr3WhdFnmrM1T3tHyW9Q9g</recordid><startdate>20211001</startdate><enddate>20211001</enddate><creator>Solonenko, Dmytro</creator><creator>Lan, Chuanqi</creator><creator>Schmidt, Constance</creator><creator>Stoeckel, Chris</creator><creator>Hiller, Karla</creator><creator>Zahn, Dietrich R. T</creator><general>Springer</general><scope>ISR</scope></search><sort><creationdate>20211001</creationdate><title>Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt</title><author>Solonenko, Dmytro ; Lan, Chuanqi ; Schmidt, Constance ; Stoeckel, Chris ; Hiller, Karla ; Zahn, Dietrich R. T</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-gale_incontextgauss_ISR_A6699856183</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Dielectric films</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Solonenko, Dmytro</creatorcontrib><creatorcontrib>Lan, Chuanqi</creatorcontrib><creatorcontrib>Schmidt, Constance</creatorcontrib><creatorcontrib>Stoeckel, Chris</creatorcontrib><creatorcontrib>Hiller, Karla</creatorcontrib><creatorcontrib>Zahn, Dietrich R. T</creatorcontrib><collection>Gale In Context: Science</collection><jtitle>Journal of materials science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Solonenko, Dmytro</au><au>Lan, Chuanqi</au><au>Schmidt, Constance</au><au>Stoeckel, Chris</au><au>Hiller, Karla</au><au>Zahn, Dietrich R. T</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt</atitle><jtitle>Journal of materials science</jtitle><date>2021-10-01</date><risdate>2021</risdate><volume>56</volume><issue>28</issue><spage>16181</spage><pages>16181-</pages><issn>0022-2461</issn><eissn>1573-4803</eissn><pub>Springer</pub><doi>10.1007/s10853-021-06301-6</doi><tpages>2</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0022-2461
ispartof Journal of materials science, 2021-10, Vol.56 (28), p.16181
issn 0022-2461
1573-4803
language eng
recordid cdi_gale_incontextgauss_ISR_A669985618
source Springer Nature - Complete Springer Journals
subjects Dielectric films
Thin films
title Correction to: Co-sputtering of Al.sub.1-xSc.sub.xN thin films on Pt
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T14%3A57%3A08IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-gale&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Correction%20to:%20Co-sputtering%20of%20Al.sub.1-xSc.sub.xN%20thin%20films%20on%20Pt&rft.jtitle=Journal%20of%20materials%20science&rft.au=Solonenko,%20Dmytro&rft.date=2021-10-01&rft.volume=56&rft.issue=28&rft.spage=16181&rft.pages=16181-&rft.issn=0022-2461&rft.eissn=1573-4803&rft_id=info:doi/10.1007/s10853-021-06301-6&rft_dat=%3Cgale%3EA669985618%3C/gale%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_galeid=A669985618&rfr_iscdi=true