Vorrichtung zum Versorgen einer Prozesskammer mit fluiden Medien

DE 10239083 A UPAB: 20040418 NOVELTY - Device for supplying a process chamber with fluid media comprises a supply line (17) having a supply opening (18), seals (15, 19) assigned to the supply opening, and tensioning units (30, 31) for tensioning the supply line on a receiver of the process chamber. USE - Used in the manufacture of metal alloys, for growing crystals, for producing lenses, prisms, light-conducting rods, optical windows and optical components for photolithography, steppers, excimer lasers, wafers, computer chips and integrated circuits and electronic devices (claimed). ADVANTAGE - The process chamber can be quickly and easily charged.