Verfahren zur Verarbeitung von Abbildungen von Halbleiterstrukturen, sowie zur Prozesscharakterisierung und Prozessoptimierung mittels semantischer Datenkompression

The invention to methods for processing images of a semiconductor structure of a solar cell generated using imaging methods. Suitable methods comprise processing the image of the semiconductor structure by means of a trained neural network in order to generate a semantic representation of the image,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Demant, Matthias, Rein, Stefan, Kovvali, Aditya Sai, Greulich, Johannes, Wöhrle, Nico
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention to methods for processing images of a semiconductor structure of a solar cell generated using imaging methods. Suitable methods comprise processing the image of the semiconductor structure by means of a trained neural network in order to generate a semantic representation of the image, wherein a data variable of the semantic representation is lower than a data variable of the image. Methods further comprise storing the semantic representation assigned to the semiconductor structure, as an information carrier of relevant information of the image for determining a property of the solar cell and/or for a crystal analysis of a semiconductor structure of the solar cell. Further aspects relate to methods for improving a semiconductor process, to methods for evaluating shaded regions in spatially resolved quality images of semiconductor structures, and to methods for predicting at least one property of a solar cell.