A novel electrostatic micro-actuator class and its application potential for optical MEMS

Electrostatic actuation is highly efficient at micro and nanoscale. However, due to pull-in instability large deflection requires large electrode separation and thus large driving voltages. We report on a novel electrostatic actuator class, which allows deflections in the μm-range based on electrode separations of a few 100 nm, only. Specifically designed and fabricated actuators allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation. A CMOS compatible and RoHs compliant fabrication process enable straight-forward integration. The potential for actuator based Optical MEMS devices is discussed.