Microsystem technology as a basis for integrated manufacturing
Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active su...
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| creator | Schlenker, Dirk |
| description | Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active support in high-precision machining and assembly in manufacturing. |
| format | Book Chapter |
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| language | eng |
| recordid | cdi_fraunhofer_primary_oai_fraunhofer_de_N_289169 |
| source | Fraunhofer-ePrints |
| subjects | Fertigung manufacturing Microsystem Technology (MST) microsystems Mikrosystemtechnik Mikrotechnik |
| title | Microsystem technology as a basis for integrated manufacturing |
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