Microsystem technology as a basis for integrated manufacturing

Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active su...

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Bibliographische Detailangaben
1. Verfasser: Schlenker, Dirk
Format: Buchkapitel
Sprache:eng
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Beschreibung
Zusammenfassung:Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active support in high-precision machining and assembly in manufacturing.