Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications

Bayreuth, Universität Bayreuth, Diss., 2012 Bayreuth, Universität Bayreuth, Diss., 2012

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1. Verfasser:	Wieberger, Florian
Format:	Web Resource
Sprache:	eng ; ger
Schlagworte:	Chemie
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creator	Wieberger, Florian
description	Bayreuth, Universität Bayreuth, Diss., 2012 Bayreuth, Universität Bayreuth, Diss., 2012
format	Web Resource
fullrecord	<record><control><sourceid>europeana_1GC</sourceid><recordid>TN_cdi_europeana_collections_2048441_item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2048441_item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ</sourcerecordid><originalsourceid>FETCH-europeana_collections_2048441_item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ3</originalsourceid><addsrcrecordid>eNqtjEluwkAQAH3hEIX8oT-AFLCFck1GtiCEJUyQIBerMe24pfH0aNwgJa9nUZ7AqS5V9ZA4--u1oY47QH8AI-2ePapERgfLoNzyHyqLB6lhISdyYBXjwDYY6ADra6kwR6Vr0UEtET5YG_mJGBqu4DUEx9Vt0fWTXn2R6Omfj8l7kX-ZyYCOUQKhx7IS56i62eXoOXvJsmHJSm1ptna-SD-L1NhxPjK71XQyM5sin63fpju7_E7vOjsDxutd9g</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>web_resource</recordtype></control><display><type>web_resource</type><title>Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications</title><source>Europeana Collections</source><creator>Wieberger, Florian</creator><creatorcontrib>Wieberger, Florian</creatorcontrib><description>Bayreuth, Universität Bayreuth, Diss., 2012 Bayreuth, Universität Bayreuth, Diss., 2012</description><language>eng ; ger</language><publisher>Universität Bayreuth</publisher><subject>Chemie</subject><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://data.europeana.eu/item/2048441/item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ$$EHTML$$P50$$Geuropeana$$Hfree_for_read</linktohtml><link.rule.ids>776,38496,75922</link.rule.ids><linktorsrc>$$Uhttps://data.europeana.eu/item/2048441/item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ$$EView_record_in_Europeana$$FView_record_in_$$GEuropeana$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Wieberger, Florian</creatorcontrib><title>Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications</title><description>Bayreuth, Universität Bayreuth, Diss., 2012 Bayreuth, Universität Bayreuth, Diss., 2012</description><subject>Chemie</subject><fulltext>true</fulltext><rsrctype>web_resource</rsrctype><recordtype>web_resource</recordtype><sourceid>1GC</sourceid><recordid>eNqtjEluwkAQAH3hEIX8oT-AFLCFck1GtiCEJUyQIBerMe24pfH0aNwgJa9nUZ7AqS5V9ZA4--u1oY47QH8AI-2ePapERgfLoNzyHyqLB6lhISdyYBXjwDYY6ADra6kwR6Vr0UEtET5YG_mJGBqu4DUEx9Vt0fWTXn2R6Omfj8l7kX-ZyYCOUQKhx7IS56i62eXoOXvJsmHJSm1ptna-SD-L1NhxPjK71XQyM5sin63fpju7_E7vOjsDxutd9g</recordid><creator>Wieberger, Florian</creator><general>Universität Bayreuth</general><general>University of Bayreuth</general><scope>1GC</scope></search><sort><title>Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications</title><author>Wieberger, Florian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-europeana_collections_2048441_item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ3</frbrgroupid><rsrctype>web_resources</rsrctype><prefilter>web_resources</prefilter><language>eng ; ger</language><topic>Chemie</topic><toplevel>online_resources</toplevel><creatorcontrib>Wieberger, Florian</creatorcontrib><collection>Europeana Collections</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wieberger, Florian</au><format>book</format><genre>unknown</genre><ristype>GEN</ristype><btitle>Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications</btitle><abstract>Bayreuth, Universität Bayreuth, Diss., 2012 Bayreuth, Universität Bayreuth, Diss., 2012</abstract><pub>Universität Bayreuth</pub><oa>free_for_read</oa></addata></record>
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source	Europeana Collections
subjects	Chemie
title	Synthesis and Combinatorial Optimization of Novel Star-Shaped Resist Materials for Lithographic Applications
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-25T13%3A50%3A22IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-europeana_1GC&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=unknown&rft.btitle=Synthesis%20and%20Combinatorial%20Optimization%20of%20Novel%20Star-Shaped%20Resist%20Materials%20for%20Lithographic%20Applications&rft.au=Wieberger,%20Florian&rft_id=info:doi/&rft_dat=%3Ceuropeana_1GC%3E2048441_item_CXSMN3QF3CS6E2CYPIHKCUFEKRBIYSOZ%3C/europeana_1GC%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true