ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE

An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to th...

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Bibliographische Detailangaben
Hauptverfasser:	KUMAR, ANANDA, H, SHAMOUILIAN, SHAMOUIL
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION HAND TOOLS MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MANIPULATORS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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