ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE
An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to th...
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| creator | KUMAR, ANANDA, H SHAMOUILIAN, SHAMOUIL |
| description | An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to the receiving surface (75), and a discharge electrode (85) electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck (20).
L'invention concerne un mandrin électrostatique (20) permettant de maintenir un substrat (12), comprenant un diélectrique (70) pourvu d'une surface de réception (75) destinée à recevoir ledit substrat. Le diélectrique (70) comprend une électrode de charge (80) permettant de produire une charge électrostatique destinée à maintenir le substrat, de manière électrostatique, sur la surface de réception (75). Le diélectrique comprend également une électrode de décharge (85) électriquement isolée de l'électrode de charge de façon à éliminer la charge électrostatique accumulée dans le mandrin (20). |
| format | Patent |
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L'invention concerne un mandrin électrostatique (20) permettant de maintenir un substrat (12), comprenant un diélectrique (70) pourvu d'une surface de réception (75) destinée à recevoir ledit substrat. Le diélectrique (70) comprend une électrode de charge (80) permettant de produire une charge électrostatique destinée à maintenir le substrat, de manière électrostatique, sur la surface de réception (75). Le diélectrique comprend également une électrode de décharge (85) électriquement isolée de l'électrode de charge de façon à éliminer la charge électrostatique accumulée dans le mandrin (20).</description><edition>6</edition><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERATION ; HAND TOOLS ; MACHINE TOOLS ; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS ; MANIPULATORS ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; PERFORMING OPERATIONS ; PORTABLE POWER-DRIVEN TOOLS ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19990610&DB=EPODOC&CC=WO&NR=9929001A2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19990610&DB=EPODOC&CC=WO&NR=9929001A2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KUMAR, ANANDA, H</creatorcontrib><creatorcontrib>SHAMOUILIAN, SHAMOUIL</creatorcontrib><title>ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE</title><description>An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to the receiving surface (75), and a discharge electrode (85) electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck (20).
L'invention concerne un mandrin électrostatique (20) permettant de maintenir un substrat (12), comprenant un diélectrique (70) pourvu d'une surface de réception (75) destinée à recevoir ledit substrat. Le diélectrique (70) comprend une électrode de charge (80) permettant de produire une charge électrostatique destinée à maintenir le substrat, de manière électrostatique, sur la surface de réception (75). Le diélectrique comprend également une électrode de décharge (85) électriquement isolée de l'électrode de charge de façon à éliminer la charge électrostatique accumulée dans le mandrin (20).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</subject><subject>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</subject><subject>ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GENERATION</subject><subject>HAND TOOLS</subject><subject>MACHINE TOOLS</subject><subject>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</subject><subject>MANIPULATORS</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>PERFORMING OPERATIONS</subject><subject>PORTABLE POWER-DRIVEN TOOLS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1999</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLB19XF1DgnyDw5xDPF0VnD2CHX2VnB2DHB08nFV8HdTCHIM8HTxiVRwcQVLefq5KzgqBIc6BYcEOYa48jCwpiXmFKfyQmluBgU31xBnD93Ugvz41OKCxOTUvNSS-HB_S0sjSwMDQ0cjYyKUAADTqyl1</recordid><startdate>19990610</startdate><enddate>19990610</enddate><creator>KUMAR, ANANDA, H</creator><creator>SHAMOUILIAN, SHAMOUIL</creator><scope>EVB</scope></search><sort><creationdate>19990610</creationdate><title>ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE</title><author>KUMAR, ANANDA, H ; SHAMOUILIAN, SHAMOUIL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO9929001A23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>1999</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</topic><topic>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</topic><topic>ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GENERATION</topic><topic>HAND TOOLS</topic><topic>MACHINE TOOLS</topic><topic>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</topic><topic>MANIPULATORS</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>PERFORMING OPERATIONS</topic><topic>PORTABLE POWER-DRIVEN TOOLS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KUMAR, ANANDA, H</creatorcontrib><creatorcontrib>SHAMOUILIAN, SHAMOUIL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KUMAR, ANANDA, H</au><au>SHAMOUILIAN, SHAMOUIL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE</title><date>1999-06-10</date><risdate>1999</risdate><abstract>An electrostatic chuck (20) for holding a substrate (12) comprises a dielectric (70) having a receiving surface (75) for receiving the substrate thereon. The dielectric (70) comprises a charging electrode (80) for generating electrostatic charge for electrostatically holding the substrate (12) to the receiving surface (75), and a discharge electrode (85) electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck (20).
L'invention concerne un mandrin électrostatique (20) permettant de maintenir un substrat (12), comprenant un diélectrique (70) pourvu d'une surface de réception (75) destinée à recevoir ledit substrat. Le diélectrique (70) comprend une électrode de charge (80) permettant de produire une charge électrostatique destinée à maintenir le substrat, de manière électrostatique, sur la surface de réception (75). Le diélectrique comprend également une électrode de décharge (85) électriquement isolée de l'électrode de charge de façon à éliminer la charge électrostatique accumulée dans le mandrin (20).</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre |
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| subjects | BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION HAND TOOLS MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MANIPULATORS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING |
| title | ELECTROSTATIC CHUCK CAPABLE OF RAPIDLY DECHUCKING A SUBSTRATE |
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