A MICROMACHINED VALVE FOR FLUID APPLICATIONS

A micro-valve (10) for fluid applications has been developed using the micro-fabrication technologies of bulk micro-machining, and LIGA high aspect ratio machining. Coupled with a magnetic micro-actuator (32), the operation of this micro-valve (10) has been demonstrated for the control of liquids. O...

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Bibliographische Detailangaben
Hauptverfasser:	DONNELLY, MICHAEL, M, TSUEI, TIMOTHY, W
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY DEVICES FOR VENTING OR AERATING ELECTROTHERAPY ENGINEERING ELEMENTS AND UNITS FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HUMAN NECESSITIES HYDRAULICS OR PNEUMATICS IN GENERAL HYGIENE LIGHTING MAGNETOTHERAPY MECHANICAL ENGINEERING MEDICAL OR VETERINARY SCIENCE PREPARATIONS FOR MEDICAL, DENTAL, OR TOILET PURPOSES RADIATION THERAPY TAPS THERMAL INSULATION IN GENERAL ULTRASOUND THERAPY VALVES WEAPONS
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Zusammenfassung:	A micro-valve (10) for fluid applications has been developed using the micro-fabrication technologies of bulk micro-machining, and LIGA high aspect ratio machining. Coupled with a magnetic micro-actuator (32), the operation of this micro-valve (10) has been demonstrated for the control of liquids. On a mis au point une microvalve (10) pour applications fluidiques, en utilisant les techniques de micro-usinage de volumes et l'usinage de type LIGA à rapport d'aspect élevé. Couplée à un microactuateur magnétique (32), cette microvalve (10) s'est révélée utile pour le contrôle des liquides.