METHOD OF MANUFACTURING A BODY HAVING A STRUCTURE OF LAYERS

METHOD OF MANUFACTURING A BODY HAVING A STRUCTURE OF LAYERS

Method of manufacturing a multilayer structure, in which method gold is deposited on a basic layer (3, 11) for forming a gold layer (7, 13), whereafter aluminium oxide is deposited on the gold layer for forming an aluminium oxide layer (9, 15). Silicon oxide is deposited on the aluminium oxide layer...

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Bibliographische Detailangaben
1. Verfasser: KNAPEN, PETER, SIMON, ANTONIUS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Method of manufacturing a multilayer structure, in which method gold is deposited on a basic layer (3, 11) for forming a gold layer (7, 13), whereafter aluminium oxide is deposited on the gold layer for forming an aluminium oxide layer (9, 15). Silicon oxide is deposited on the aluminium oxide layer by means of PE-CVD for forming a silicon oxide layer (11, 13), and the aluminium oxide layer constitutes an adhesive layer between the gold layer and the silicon oxide layer. Together with the aluminium oxide layer, the silicon oxide layer constitutes an insulating and/or protective cladding layer for the gold layer.