HIGH FREQUENCY OSCILLATOR COMPRISING COINTEGRATED THIN FILM RESONATOR AND ACTIVE DEVICE

A cointegrated high frequency oscillator (130) including a thin film resonator (27) and active devices (25) formed on the same semiconductor substrate (20) and by a process which is compatible with formation of both the thin film resonator and the active devices. The processes utilized in formation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BURNS, STANLEY, G, WEBER, ROBERT, J, BRAYMEN, STEVE, D
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION OF NOISE BY SUCH CIRCUITS GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS SEMICONDUCTOR DEVICES
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