HOLLOW ELECTRODE PLASMA EXCITATION SOURCE

A plasma source incorporates a furnace (10) as a hollow anode, while acoaxial cathode (24) is disposed therewithin. The source is located in a housing (12) provided with an ionizable gas such that a glow discharge is produced between anode and cathode. Radiation or ionic emission from the glow disch...

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Bibliographische Detailangaben
1. Verfasser: BALLOU, NATHAN, E
Format: Patent
Sprache:eng
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