GAS DISTRIBUTOR INCLUDING GAS AND COOLANT PLENUMS

Certain embodiments are directed to apparatus having first and second surfaces, gas distribution ports, a plenum interposed between the surfaces, and liquid cooling passages fluidically isolated from the plenum, and in one aspect, the liquid cooling passages have serpentine configuration(s). Certain...

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Bibliographische Detailangaben
Hauptverfasser:	DREWERY, John Stephen, PATERSON, Alexander Miller, ALBERTI, Andrea, SRIRAMAN, Saravanapriyan
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Certain embodiments are directed to apparatus having first and second surfaces, gas distribution ports, a plenum interposed between the surfaces, and liquid cooling passages fluidically isolated from the plenum, and in one aspect, the liquid cooling passages have serpentine configuration(s). Certains modes de réalisation concernent un appareil ayant des première et seconde surfaces, des orifices de distribution de gaz, un plénum interposé entre les surfaces, et des passages de refroidissement de liquide isolés fluidiquement du plénum, et selon un aspect, les passages de refroidissement de liquide ont une ou plusieurs configurations en serpentin.