MICRO-ELECTRO-MECHANICAL SYSTEM CHIP, CONTROL METHOD, AND RELATED APPARATUS

The embodiments of the present application relate to the technical field of micro-electro-mechanical systems. Provided are a micro-electro-mechanical system chip, a control method, and a related apparatus, which are used for ameliorating the problem in the relevant art of the linearity of a voltage-displacement curve of a micro-mirror device being relatively poor. The micro-electro-mechanical system chip comprises a drive circuit base and a micro-mirror array, wherein the micro-mirror array comprises a plurality of micro-mirror devices which are arranged in an array, and each micro-mirror device comprises a support beam, a movable plate electrode, a fixed plate electrode, a movable repulsion electrode and a fixed repulsion electrode. The movable plate electrode and the fixed plate electrode are disposed opposite each other, the movable plate electrode is mounted on the support beam, a micro-mirror is disposed on the side of the movable plate electrode that is away from the drive circuit base, and the fixed pl