SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRIC OR ASYMMETRIC APPLICATION OF FORCE

An ion source is disclosed, in which the compression force applied to the faceplate on the two sides of the extraction aperture may be varied independently. Modi fying the compression force between the faceplate and arc chamber can enable temperature control of the ion source by modi fying the therm...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PRAGER, Ryan, WALDER, John Alexander
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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