SYSTEM AND PROCESS FOR IMPRINTING

The invention relates to a system and process for imprinting, in particular nanoimprinting. The system comprises thereto a combination of a roller configured for rolling at least one flexible stamp over at least one substrate which is to be imprinted, a stage configured for providing support to at l...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TER MEULEN, Jan Matthijs, NEELEN, Rob Antonius Waltherus
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to a system and process for imprinting, in particular nanoimprinting. The system comprises thereto a combination of a roller configured for rolling at least one flexible stamp over at least one substrate which is to be imprinted, a stage configured for providing support to at least one carrier and/or at least one substrate during imprinting and a carrier configured for carrying at least one substrate which is to be imprinted. L'invention concerne un système et un procédé d'impression, en particulier de nano-impression. Le système comprend une combinaison d'un rouleau conçu pour laminer au moins un tampon souple sur au moins un substrat qui doit être imprimé, un étage conçu pour assurer un support à au moins un support et/ou au moins un substrat pendant l'impression et un support conçu pour porter au moins un substrat qui doit être imprimé.