PROCESSING CHAMBER WITH GAS RECYCLING

Semiconductor manufacturing processing chambers with recycling capability and methods of recycling a chemical precursor are described. The processing chamber comprises a chamber body with a substrate support. The substrate support is spaced form the chamber lid to create a process region. A gas inle...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GAIKWAD, Vaibhav, BASAVARAJU, Abhishek, PANAVALAPPIL KUMARANKUTTY, Hanish Kumar, JOY, Anand, RICE, Michael Robert
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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