ARTICLE FOR CHEMICAL MECHANICAL POLISHING PROCESS AND CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING THE ARTICLE

An article for use in a chemical mechanical polishing process includes a metal backbone and a thermoplastic composition encapsulating the metal backbone. The metal backbone can optionally include a buffer layer between the surface of the backbone and the thermoplastic composition. The metal backbone...

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Bibliographische Detailangaben
Hauptverfasser:	SUN, Yanjie, KIM, Haekwon, HYUN, Soonyoung
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS POLISHING THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING
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Beschreibung
Zusammenfassung:	An article for use in a chemical mechanical polishing process includes a metal backbone and a thermoplastic composition encapsulating the metal backbone. The metal backbone can optionally include a buffer layer between the surface of the backbone and the thermoplastic composition. The metal backbone or, when present, the buffer layer includes a plurality of pores. Methods for the manufacture of the article are also described. Un article destiné à être utilisé dans un procédé de polissage chimico-mécanique comprend un squelette métallique et une composition thermoplastique encapsulant le squelette métallique. Le squelette métallique peut éventuellement comprendre une couche tampon entre la surface du squelette et la composition thermoplastique. Le squelette métallique ou, lorsqu'il est présent, la couche tampon comprend une pluralité de pores. L'invention concerne également des procédés de fabrication de l'article.