CONFIGURABLE ILLUMINATION SOURCE FOR OPTICAL METROLOGY AND RELATED METHODS

The application pertains to an illumination source for optical metrology. The source includes a matrix that includes twenty-five light emitting diodes (LEDs) arranged in twelve sets associated with twelve peak wavelength ranges. The sets have peak wavelength ranges within the 400 till 1000 nanometer...

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Bibliographische Detailangaben
Hauptverfasser:	COHEN, Eyal, YALOV, Shimon, MACHNOVSKY, Slava, DAVIDOVICH, Alex, COHEN, Meir
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21Sand F21V, RELATING TO THEFORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THELIGHT EMITTED INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PHYSICS SEMICONDUCTOR DEVICES TESTING WEAPONS
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Beschreibung
Zusammenfassung:	The application pertains to an illumination source for optical metrology. The source includes a matrix that includes twenty-five light emitting diodes (LEDs) arranged in twelve sets associated with twelve peak wavelength ranges. The sets have peak wavelength ranges within the 400 till 1000 nanometer range. Each set of LEDs is controlled independently, and each LED has a controllable intensity. The illumination source also includes a controller configured to selectively activate any combination of LEDs and control the matrix based on a metrology recipe. The claim also includes a method for illuminating a sample using the illumination source. La demande concerne une source d'éclairage pour métrologie optique. La source comprend une matrice qui comprend vingt-cinq diodes électroluminescentes (DEL) agencées en douze ensembles associés à douze plages de longueurs d'onde de pic. Les ensembles ont des plages de longueurs d'onde de pic dans la plage de 400 jusqu'à 1000 nanomètres. Chaque ensemble de DEL est commandé indépendamment, et chaque DEL a une intensité réglable. La source d'éclairage comprend également un dispositif de commande configuré pour activer sélectivement toute combinaison de DEL et commander la matrice sur la base d'une recette de métrologie. La revendication comprend également un procédé d'éclairage d'un échantillon à l'aide de la source d'éclairage.