MEMS MICROMIRROR SYSTEM, LASER RADAR SYSTEM, AND VEHICLE

An MEMS micromirror system, a laser radar system, and a vehicle, relating to the technical field of laser radars, and capable of improving the impact resistance of the MEMS micromirror system. A movable portion (110) in the MEMS micromirror system comprises a movable structure (112), a reflective st...

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Bibliographische Detailangaben
Hauptverfasser:	XU, Jinghui, DONG, Xiaoshi, CHANG, Zhiwu, ZHAO, Fei
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASURING PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION TESTING
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Beschreibung
Zusammenfassung:	An MEMS micromirror system, a laser radar system, and a vehicle, relating to the technical field of laser radars, and capable of improving the impact resistance of the MEMS micromirror system. A movable portion (110) in the MEMS micromirror system comprises a movable structure (112), a reflective structure (111), and a reinforcing structure (113); a fixed portion (130) comprises at least two fixed structures, and each fixed structure comprises a first fixed layer (131) and a second fixed layer (132); each first fixed layer (131) is located above the corresponding second fixed layer (132), and the first fixed layer (131) is thinner than the second fixed layer (132); a support portion comprises a first cantilever beam (121) and a second cantilever beam (122); one end of each of the first cantilever beam (121) and the second cantilever beam (122) is connected to the reinforcing structure (113), and the other end is connected to the corresponding second fixed layer (132). The overall thickness of the first cantil