EMBEDDED MICROLENS

Embodiments described herein relate to a photonic device having a microlens and micromirror embedded therein and methods of fabricating such a device. An example photonic device comprises a substrate; a buried oxide (BOX) layer disposed over the substrate; a waveguide layer disposed over the BOX lay...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VERHAVERBEKE, Steven, VISSER, Robert Jan, OHNO, Kenichi
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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