ELECTRON MICROSCOPY APPARATUS AND METHOD FOR A TIME RESOLVED LOW ENERGY ELECTRON MICROSCOPY INVESTIGATION OF A SAMPLE

An electron microscopy apparatus (100) for time resolved low energy electron microscopy investigation of a sample (1) comprises a tip-shaped photo-emitter source (11), which is arranged for radiation-induced emission of source electrons (2) towards the sample (1), a radiation source device (20) for...

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Hauptverfasser: VOGELGESANG, Simon, FEIST, Armin, ROPERS, Claus, OTTO, Johannes, HORSTMANN, Jan Gerrit
Format: Patent
Sprache:eng ; fre
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