CHARGED PARTICLE BEAM DEVICE

In the present invention, the visibility of a region which is difficult to observe can be improved. A charged particle beam device 100 irradiates a sample with a charged particle beam 121 to obtain an observation image of the sample. The charged particle beam device 100 comprises: an electron gun 10...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NIIBORI Tetsuya, SAITO Eri, OKAI Nobuhiro, HATTORI Tatsumi, SUZUKI Naomasa
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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