COLLECTION DEVICE FOR PREPARATION OF ELECTRONIC GRADE FLUORINE
A collection device for preparation of electronic grade fluorine, comprising a collection cylinder (1). The whole collection cylinder (1) is made of carbon steel, and the collection cylinder (1) is of an inner-outer double-layer structure; a filling layer (13) is arranged between the inner double-la...
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Format: | Patent |
Sprache: | chi ; eng ; fre |
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Zusammenfassung: | A collection device for preparation of electronic grade fluorine, comprising a collection cylinder (1). The whole collection cylinder (1) is made of carbon steel, and the collection cylinder (1) is of an inner-outer double-layer structure; a filling layer (13) is arranged between the inner double-layer structure and the outer double-layer structure of the collection cylinder (1); argon is injected into the filling layer (13); a gas collection pipe opening (11) is formed at the upper end of the collection cylinder (1); tetrafluoroethylene paints are applied on the inner wall and the outer wall of the gas collection pipe opening (11); polytetrafluoroethylene is used to reduce the degree that the gas collection pipe opening (11) is eroded by electronic grade fluorine in the process of conveying the electronic grade fluorine to the collection cylinder (1), and the situation that the electronic grade fluorine leaks from the gas collection pipe opening (11) is reduced, thereby further ensuring the safety after the |
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