GRINDING DEVICE, INCLINATION ADJUSTMENT METHOD AND INFORMATION DISPLAY UNIT

Provided is a grinding device for grinding a substrate, the grinding device including: a substrate holding unit that holds a substrate on a holding surface; a grinding unit that grinds, with a grinding surface, the substrate held by the substrate holding unit; an inclination adjustment unit that adj...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YARIMITSU, Masakazu, FUKUNAGA, Nobutaka
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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