MEASUREMENT DEVICE, METHOD OF MEASUREMENT, AND METHOD OF MANUFACTURING DEVICES

A measurement device for measuring a substrate, the measurement device comprising: an optical sensor configured to make a measurement of a substrate surface by emitting a light beam; and a fluid supply configured to supply a conditioning fluid traversing the light beam and flowing in a slit between...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BLOKS, Ruud, DONKERBROEK, Arend, DE LANGE, Max
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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