LARGE SCALE SYSTEM FOR ATOMIC LAYER DEPOSITION

A system, apparatus, and method of atomic layer deposition (ALD) having an arrangement of components designed to process large quantities of powders that is highly reproducible and accurate. Precursors can be supplied to a reactor by surge vessels that also serve the purpose of vaporizing the liquid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	RAGONESI, James, EVANKO, Brian, BROERMAN, Andrew
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A system, apparatus, and method of atomic layer deposition (ALD) having an arrangement of components designed to process large quantities of powders that is highly reproducible and accurate. Precursors can be supplied to a reactor by surge vessels that also serve the purpose of vaporizing the liquid precursors. These vessels are allowed to swing in pressure and deliver the precursor to the reactor, and be refilled in-line as necessary without disrupting the manufacturing process. L'invention concerne un système, un appareil et un procédé de dépôt de couches atomiques (ALD) ayant un agencement de composants conçus pour traiter de grandes quantités de poudres qui est hautement reproductible et précis. Des précurseurs peuvent être fournis à un réacteur par des récipients de surtension qui servent également à vaporiser les précurseurs liquides. Ces récipients peuvent osciller sous pression et distribuer le précurseur au réacteur et être remplis de nouveau en ligne si nécessaire sans perturber le processus de fabrication.