JIG FOR SUBSTRATE HOLDER, SUBSTRATE PROCESSING DEVICE, AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE

Provided is an invention configured so that a substrate holder comprising a plurality of pillars linking at least a bottom plate and a top plate is mounted thereto, said invention having: a first index part configured so that when the substrate holder, which has a notch in at least the bottom plate,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JINDEN, Tatsuki, MIYASHITA, Tomoyasu, NAKASHIMA, Seiyo
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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