CHARGED PARTICLE BEAM DEVICE AND METHOD FOR PREPARING AND OBERVING SAMPLE PIECE

Provided is a charged particle beam device that controls the orientation of a holder 6 capable of holding a plurality of carriers, and that is capable of transporting the holder independently of a wafer stage 21. The charged particle beam device comprises: a wafer stage 21 on which a wafer is placed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKABE, Mamoru, HIGASHI, Yoshinori
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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