DIFFRACTION DETECTION APPARATUS, INSPECTION EQUIPMENT, INSPECTION METHOD, AND INSPECTION SYSTEM

Provided are a diffraction detection apparatus, inspection equipment, an inspection method therefor, and an inspection system. The diffraction detection apparatus comprises a support frame; a diffraction radiation source; and a diffracted radiation detector, said diffracted radiation detector and sa...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG, Li, ZHANG, Liguo, LI, Guipei, CHEN, Zhiqiang, LI, Yuanjing, FENG, Bo, HE, Zhifeng, HUANG, Qingping
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Provided are a diffraction detection apparatus, inspection equipment, an inspection method therefor, and an inspection system. The diffraction detection apparatus comprises a support frame; a diffraction radiation source; and a diffracted radiation detector, said diffracted radiation detector and said radiation source defining an inspection passage that extends in a first direction; and the diffracted radiation detector is configured to receive diffracted radiation from an inspected object in the inspection passage to facilitate determination of a characteristic of a substance causing diffraction. The support frame is configured to allow the radiation source and the diffracted radiation detector to move in a second direction on the support frame across the inspection passage, the second direction being a direction transverse to the first direction. L'invention concerne un appareil de détection de diffraction, un équipement d'inspection, un procédé d'inspection associé et un système d'inspection. L'appareil de