OZONE SUPPLY DEVICE AND OZONE SUPPLY METHOD

This ozone supply device comprises: an ozone generator (1) that generates ozone; an adsorbing and desorbing tower (2) that adsorbs and desorbs the ozone; an ozonized gas transfer circuit (7) for transferring ozonized gas generated in the ozone generator to the adsorbing and desorbing tower; a pressu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOGA Hiromichi, MATSUURA Yoko, OINUMA Gaku, YASUNAGA Nozomu, ARIMA Yoshiaki
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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