SPIN COATING METHOD AND DEVICE, AND MANUFACTURING METHOD FOR THIN FILM BATTERY

The present invention relates to a spin coating method and device, and a manufacturing method for a thin film battery. In the spin coating method, the entire substrate to be spin-coated is arranged away from a center of rotation, the substrate is inclined relative to a plane of rotation, the include...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUANG, Qiang, YU, Songkun
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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