SPIN COATING METHOD AND DEVICE, AND MANUFACTURING METHOD FOR THIN FILM BATTERY

The present invention relates to a spin coating method and device, and a manufacturing method for a thin film battery. In the spin coating method, the entire substrate to be spin-coated is arranged away from a center of rotation, the substrate is inclined relative to a plane of rotation, the include...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HUANG, Qiang, YU, Songkun
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a spin coating method and device, and a manufacturing method for a thin film battery. In the spin coating method, the entire substrate to be spin-coated is arranged away from a center of rotation, the substrate is inclined relative to a plane of rotation, the included angle between the back surface of the substrate and the plane of rotation is an included angle a, wherein the included angle a is greater than 0° and less than 90°, a spin coating liquid is placed on one side of the bottom of the front surface of the substrate, and the substrate rotates around the center of rotation, such that the spin coating liquid extends upward from the bottom to cover the front surface of the substrate, so as to complete spin coating. The spin coating device comprises a rotating mechanism and a substrate fixing mechanism. The manufacturing method for a thin film battery comprises spin-coating and preparing a functional film layer of a thin film battery by using the spin coating method. The b