COFEB TARGET MATERIAL AND PREPARATION METHOD THEREFOR

A CoFeB target material and a preparation method therefor. The preparation method comprises the following steps: (1) carrying out melting of a raw material blank; (2) carrying out secondary charging; (3) carrying out stirring; (4) carrying out melt casting; and (5) preparation of a target material....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HE, Jinjiang, YANG, Wenkui, SU, Xiaoao, LI, Yongjun, LUO, Junfeng, LV, Baoguo, ZHU, Ziyi, XU, Guojin
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS
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