DEVICE FEATURE SPECIFIC EDGE PLACEMENT ERROR (EPE)

A system and method are disclosed for generating metrology measurements with second sub-system such as an optical sub-system. The method may include performing a training and a run-time operation. The training may include receiving first metrology data for device features from the first metrology su...

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Bibliographische Detailangaben
Hauptverfasser: GUTMAN, Nadav, SHCHEGROV, Andrei V, MANASSEN, Amnon, LASKE, Frank
Format: Patent
Sprache:eng ; fre
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