AVOIDING RECIRCULATION ZONES IN A VACUUM LINE OF A DEPOSITION TOOL

One example provides a deposition tool. The deposition tool comprises a processing chamber and a vacuum system. The vacuum system comprises a vacuum line configured to carry a flow of exhaust from the processing chamber. The vacuum system further comprises a valve positioned within the vacuum line....

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Bibliographische Detailangaben
Hauptverfasser:	MISHRA PARASNATH, Pankaj, RAMESH, Ashwin, LANGAN, Peter Andrew, KAUSHIK, Lav
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	One example provides a deposition tool. The deposition tool comprises a processing chamber and a vacuum system. The vacuum system comprises a vacuum line configured to carry a flow of exhaust from the processing chamber. The vacuum system further comprises a valve positioned within the vacuum line. The vacuum system further comprises a purge gas inlet disposed along the vacuum line. Un exemple concerne un outil de dépôt. L'outil de dépôt comprend une chambre de traitement et un système à vide. Le système à vide comprend une conduite à vide conçue pour transporter un flux d'échappement à partir de la chambre de traitement. Le système à vide comprend en outre une soupape positionnée à l'intérieur de la conduite à vide. Le système à vide comprend en outre une entrée de gaz de purge disposée le long de la conduite à vide.