DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN
The present invention relates to a diamond manufacturing apparatus using plasma and a disk assembly used therein. The diamond manufacturing apparatus comprises: a plasma chamber including a plasma region in which plasma is formed; a disk which includes one or more connection portions and is installe...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | |
---|---|
container_issue | |
container_start_page | |
container_title | |
container_volume | |
creator | SONG, Oh Sung |
description | The present invention relates to a diamond manufacturing apparatus using plasma and a disk assembly used therein. The diamond manufacturing apparatus comprises: a plasma chamber including a plasma region in which plasma is formed; a disk which includes one or more connection portions and is installed in the inner space of the plasma chamber and on which a diamond seed is mounted; a first disk support which is connected to the disk and includes a first accommodation portion coupled to the connection portions; a second disk support which is on the first disk support and includes a second accommodation portion that can be coupled to the connection portions; a microwave generator which is located below the disk and radiates microwaves into the plasma chamber; and a gas injection unit which is located above the disk and provides a diamond manufacturing process gas to the plasma chamber. When at least one of the first disk support or the second disk support rotates so that the first accommodating portion and the second accommodating portion are aligned, the disk moves from the first disk support to the second disk support, and the connection portions and the second accommodation portion are coupled.
La présente invention concerne un appareil de fabrication de diamant à l'aide d'un ensemble plasma et disque utilisé en son sein. L'appareil de fabrication de diamant comprend : une chambre à plasma comprenant une région de plasma dans laquelle est formé un plasma ; un disque qui comprend une ou plusieurs parties de liaison et qui est installé dans l'espace interne de la chambre à plasma et sur lequel est montée un germe de diamant ; un premier support de disque qui est relié au disque et comprend une première partie de réception accouplée aux parties de liaison ; un second support de disque qui se trouve sur le premier support de disque et comprend une seconde partie de réception qui peut être accouplée aux parties de liaison ; un générateur de micro-ondes qui est situé au-dessous du disque et rayonne des micro-ondes dans la chambre à plasma ; et une unité d'injection de gaz qui est située au-dessus du disque et fournit à la chambre à plasma un gaz de procédé de fabrication de diamant. Lorsque le premier support de disque et/ou le second support de disque tourne(nt) de telle sorte que la première partie de réception et la seconde partie de réception soient alignées, le disque se déplace du premier support de disque au second support de disque, et les parties de liai |
format | Patent |
fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2024085357A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2024085357A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2024085357A13</originalsourceid><addsrcrecordid>eNrjZPB28XT09fdzUfB19At1c3QOCQ3y9HNXcAwIcAxyDAkNVggNBvEDfByDfR0VHIEKXTyDvRUcg4NdfZ18IoHSri4KIR6uQa6efjwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JD7c38jAyMTAwtTY1NzR0Jg4VQBPCy6t</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN</title><source>esp@cenet</source><creator>SONG, Oh Sung</creator><creatorcontrib>SONG, Oh Sung</creatorcontrib><description>The present invention relates to a diamond manufacturing apparatus using plasma and a disk assembly used therein. The diamond manufacturing apparatus comprises: a plasma chamber including a plasma region in which plasma is formed; a disk which includes one or more connection portions and is installed in the inner space of the plasma chamber and on which a diamond seed is mounted; a first disk support which is connected to the disk and includes a first accommodation portion coupled to the connection portions; a second disk support which is on the first disk support and includes a second accommodation portion that can be coupled to the connection portions; a microwave generator which is located below the disk and radiates microwaves into the plasma chamber; and a gas injection unit which is located above the disk and provides a diamond manufacturing process gas to the plasma chamber. When at least one of the first disk support or the second disk support rotates so that the first accommodating portion and the second accommodating portion are aligned, the disk moves from the first disk support to the second disk support, and the connection portions and the second accommodation portion are coupled.
La présente invention concerne un appareil de fabrication de diamant à l'aide d'un ensemble plasma et disque utilisé en son sein. L'appareil de fabrication de diamant comprend : une chambre à plasma comprenant une région de plasma dans laquelle est formé un plasma ; un disque qui comprend une ou plusieurs parties de liaison et qui est installé dans l'espace interne de la chambre à plasma et sur lequel est montée un germe de diamant ; un premier support de disque qui est relié au disque et comprend une première partie de réception accouplée aux parties de liaison ; un second support de disque qui se trouve sur le premier support de disque et comprend une seconde partie de réception qui peut être accouplée aux parties de liaison ; un générateur de micro-ondes qui est situé au-dessous du disque et rayonne des micro-ondes dans la chambre à plasma ; et une unité d'injection de gaz qui est située au-dessus du disque et fournit à la chambre à plasma un gaz de procédé de fabrication de diamant. Lorsque le premier support de disque et/ou le second support de disque tourne(nt) de telle sorte que la première partie de réception et la seconde partie de réception soient alignées, le disque se déplace du premier support de disque au second support de disque, et les parties de liaison et la seconde partie de réception sont accouplées.
본 발명은 플라즈마를 이용한 다이아몬드 제조 장치 및 이에 이용되는 디스크 어셈블리에 관한 것이다. 상기 다이아몬드 제조 장치는, 플라즈마가 형성되는 플라즈마 영역을 포함하는 플라즈마 챔버, 하나 이상의 연결부를 포함하고, 상기 플라즈마 챔버의 내부 공간에 설치되고, 다이아몬드 씨드가 실장되는 디스크, 상기 디스크와 연결되고, 상기 연결부와 결합된 제1 수용부를 포함하는 제1 디스크 지지체, 상기 제1 디스크 지지체 상에, 상기 연결부와 결합 가능한 제2 수용부를 포함하는 제2 디스크 지지체, 상기 디스크의 하부에 위치하고, 마이크로파를 상기 플라즈마 챔버 내부로 방사하는 마이크로파 생성부 및 상기 디스크의 상부에 위치하고, 다이아몬드 제조 공정 가스를 상기 플라즈마 챔버에 제공하는 가스 주입부를 포함하고, 상기 제1 디스크 지지체 및 상기 제2 디스크 지지체 중 적어도 하나가 회전하여, 상기 제1 수용부와 상기 제2 수용부가 정렬되는 경우, 상기 디스크는 상기 제1 디스크 지지체에서 상기 제2 디스크 지지체로 이동하고, 상기 연결부와 상기 제2 수용부가 결합되는 다이아몬드 제조 장치를 포함한다.</description><language>eng ; fre ; kor</language><subject>AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE ; APPARATUS THEREFOR ; CHEMISTRY ; CRYSTAL GROWTH ; METALLURGY ; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE ; REFINING BY ZONE-MELTING OF MATERIAL ; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE ; SINGLE-CRYSTAL-GROWTH ; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240425&DB=EPODOC&CC=WO&NR=2024085357A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240425&DB=EPODOC&CC=WO&NR=2024085357A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SONG, Oh Sung</creatorcontrib><title>DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN</title><description>The present invention relates to a diamond manufacturing apparatus using plasma and a disk assembly used therein. The diamond manufacturing apparatus comprises: a plasma chamber including a plasma region in which plasma is formed; a disk which includes one or more connection portions and is installed in the inner space of the plasma chamber and on which a diamond seed is mounted; a first disk support which is connected to the disk and includes a first accommodation portion coupled to the connection portions; a second disk support which is on the first disk support and includes a second accommodation portion that can be coupled to the connection portions; a microwave generator which is located below the disk and radiates microwaves into the plasma chamber; and a gas injection unit which is located above the disk and provides a diamond manufacturing process gas to the plasma chamber. When at least one of the first disk support or the second disk support rotates so that the first accommodating portion and the second accommodating portion are aligned, the disk moves from the first disk support to the second disk support, and the connection portions and the second accommodation portion are coupled.
La présente invention concerne un appareil de fabrication de diamant à l'aide d'un ensemble plasma et disque utilisé en son sein. L'appareil de fabrication de diamant comprend : une chambre à plasma comprenant une région de plasma dans laquelle est formé un plasma ; un disque qui comprend une ou plusieurs parties de liaison et qui est installé dans l'espace interne de la chambre à plasma et sur lequel est montée un germe de diamant ; un premier support de disque qui est relié au disque et comprend une première partie de réception accouplée aux parties de liaison ; un second support de disque qui se trouve sur le premier support de disque et comprend une seconde partie de réception qui peut être accouplée aux parties de liaison ; un générateur de micro-ondes qui est situé au-dessous du disque et rayonne des micro-ondes dans la chambre à plasma ; et une unité d'injection de gaz qui est située au-dessus du disque et fournit à la chambre à plasma un gaz de procédé de fabrication de diamant. Lorsque le premier support de disque et/ou le second support de disque tourne(nt) de telle sorte que la première partie de réception et la seconde partie de réception soient alignées, le disque se déplace du premier support de disque au second support de disque, et les parties de liaison et la seconde partie de réception sont accouplées.
본 발명은 플라즈마를 이용한 다이아몬드 제조 장치 및 이에 이용되는 디스크 어셈블리에 관한 것이다. 상기 다이아몬드 제조 장치는, 플라즈마가 형성되는 플라즈마 영역을 포함하는 플라즈마 챔버, 하나 이상의 연결부를 포함하고, 상기 플라즈마 챔버의 내부 공간에 설치되고, 다이아몬드 씨드가 실장되는 디스크, 상기 디스크와 연결되고, 상기 연결부와 결합된 제1 수용부를 포함하는 제1 디스크 지지체, 상기 제1 디스크 지지체 상에, 상기 연결부와 결합 가능한 제2 수용부를 포함하는 제2 디스크 지지체, 상기 디스크의 하부에 위치하고, 마이크로파를 상기 플라즈마 챔버 내부로 방사하는 마이크로파 생성부 및 상기 디스크의 상부에 위치하고, 다이아몬드 제조 공정 가스를 상기 플라즈마 챔버에 제공하는 가스 주입부를 포함하고, 상기 제1 디스크 지지체 및 상기 제2 디스크 지지체 중 적어도 하나가 회전하여, 상기 제1 수용부와 상기 제2 수용부가 정렬되는 경우, 상기 디스크는 상기 제1 디스크 지지체에서 상기 제2 디스크 지지체로 이동하고, 상기 연결부와 상기 제2 수용부가 결합되는 다이아몬드 제조 장치를 포함한다.</description><subject>AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE</subject><subject>APPARATUS THEREFOR</subject><subject>CHEMISTRY</subject><subject>CRYSTAL GROWTH</subject><subject>METALLURGY</subject><subject>PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</subject><subject>REFINING BY ZONE-MELTING OF MATERIAL</subject><subject>SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</subject><subject>SINGLE-CRYSTAL-GROWTH</subject><subject>UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPB28XT09fdzUfB19At1c3QOCQ3y9HNXcAwIcAxyDAkNVggNBvEDfByDfR0VHIEKXTyDvRUcg4NdfZ18IoHSri4KIR6uQa6efjwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JD7c38jAyMTAwtTY1NzR0Jg4VQBPCy6t</recordid><startdate>20240425</startdate><enddate>20240425</enddate><creator>SONG, Oh Sung</creator><scope>EVB</scope></search><sort><creationdate>20240425</creationdate><title>DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN</title><author>SONG, Oh Sung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2024085357A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; kor</language><creationdate>2024</creationdate><topic>AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE</topic><topic>APPARATUS THEREFOR</topic><topic>CHEMISTRY</topic><topic>CRYSTAL GROWTH</topic><topic>METALLURGY</topic><topic>PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</topic><topic>REFINING BY ZONE-MELTING OF MATERIAL</topic><topic>SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE</topic><topic>SINGLE-CRYSTAL-GROWTH</topic><topic>UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL</topic><toplevel>online_resources</toplevel><creatorcontrib>SONG, Oh Sung</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SONG, Oh Sung</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN</title><date>2024-04-25</date><risdate>2024</risdate><abstract>The present invention relates to a diamond manufacturing apparatus using plasma and a disk assembly used therein. The diamond manufacturing apparatus comprises: a plasma chamber including a plasma region in which plasma is formed; a disk which includes one or more connection portions and is installed in the inner space of the plasma chamber and on which a diamond seed is mounted; a first disk support which is connected to the disk and includes a first accommodation portion coupled to the connection portions; a second disk support which is on the first disk support and includes a second accommodation portion that can be coupled to the connection portions; a microwave generator which is located below the disk and radiates microwaves into the plasma chamber; and a gas injection unit which is located above the disk and provides a diamond manufacturing process gas to the plasma chamber. When at least one of the first disk support or the second disk support rotates so that the first accommodating portion and the second accommodating portion are aligned, the disk moves from the first disk support to the second disk support, and the connection portions and the second accommodation portion are coupled.
La présente invention concerne un appareil de fabrication de diamant à l'aide d'un ensemble plasma et disque utilisé en son sein. L'appareil de fabrication de diamant comprend : une chambre à plasma comprenant une région de plasma dans laquelle est formé un plasma ; un disque qui comprend une ou plusieurs parties de liaison et qui est installé dans l'espace interne de la chambre à plasma et sur lequel est montée un germe de diamant ; un premier support de disque qui est relié au disque et comprend une première partie de réception accouplée aux parties de liaison ; un second support de disque qui se trouve sur le premier support de disque et comprend une seconde partie de réception qui peut être accouplée aux parties de liaison ; un générateur de micro-ondes qui est situé au-dessous du disque et rayonne des micro-ondes dans la chambre à plasma ; et une unité d'injection de gaz qui est située au-dessus du disque et fournit à la chambre à plasma un gaz de procédé de fabrication de diamant. Lorsque le premier support de disque et/ou le second support de disque tourne(nt) de telle sorte que la première partie de réception et la seconde partie de réception soient alignées, le disque se déplace du premier support de disque au second support de disque, et les parties de liaison et la seconde partie de réception sont accouplées.
본 발명은 플라즈마를 이용한 다이아몬드 제조 장치 및 이에 이용되는 디스크 어셈블리에 관한 것이다. 상기 다이아몬드 제조 장치는, 플라즈마가 형성되는 플라즈마 영역을 포함하는 플라즈마 챔버, 하나 이상의 연결부를 포함하고, 상기 플라즈마 챔버의 내부 공간에 설치되고, 다이아몬드 씨드가 실장되는 디스크, 상기 디스크와 연결되고, 상기 연결부와 결합된 제1 수용부를 포함하는 제1 디스크 지지체, 상기 제1 디스크 지지체 상에, 상기 연결부와 결합 가능한 제2 수용부를 포함하는 제2 디스크 지지체, 상기 디스크의 하부에 위치하고, 마이크로파를 상기 플라즈마 챔버 내부로 방사하는 마이크로파 생성부 및 상기 디스크의 상부에 위치하고, 다이아몬드 제조 공정 가스를 상기 플라즈마 챔버에 제공하는 가스 주입부를 포함하고, 상기 제1 디스크 지지체 및 상기 제2 디스크 지지체 중 적어도 하나가 회전하여, 상기 제1 수용부와 상기 제2 수용부가 정렬되는 경우, 상기 디스크는 상기 제1 디스크 지지체에서 상기 제2 디스크 지지체로 이동하고, 상기 연결부와 상기 제2 수용부가 결합되는 다이아몬드 제조 장치를 포함한다.</abstract><oa>free_for_read</oa></addata></record> |
fulltext | fulltext_linktorsrc |
identifier | |
ispartof | |
issn | |
language | eng ; fre ; kor |
recordid | cdi_epo_espacenet_WO2024085357A1 |
source | esp@cenet |
subjects | AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL |
title | DIAMOND MANUFACTURING APPARATUS USING PLASMA AND DISK ASSEMBLY USED THEREIN |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T17%3A02%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SONG,%20Oh%20Sung&rft.date=2024-04-25&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EWO2024085357A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |