MEMS SWITCH

A microelectromechanical system (MEMS) switch (100) that is implemented with a coplanar waveguide (104). The MEMS switch (100) includes an input terminal (124) and an output terminal (128). The MEMS switch (100) includes a beam (132) extending between the input terminal (124) and the output terminal...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FRUEHLING, Adam, ARITURK, Gokhan
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES RELAYS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE SELECTORS WAVEGUIDES
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